PST Co., Ltd.

Mini Batch Vertical Furnace

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PST Co., Ltd.
[Korea]

Address
#451-2 , Ipyeong-ri, Majang-myeon Icheon-si Gyeonggi-do
Phone
82-31-6408831
Contact name
Dong-mi Kim

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Product Details

Quick Information

  • Model Number : M20VH

Description

Application

  • Diffusion / Oxidation(Wet/Dry) / Annealing / Alloy / LPCVD

Features

  • Mini Batch Type Vertical Furnace
  • Vertical Furnace for 100~300mm wafers
  • 2 I/O Port
  • Boat Rotation Available
  • PFlexibility for S/W upgrade

Specification

Parameters
Unit
Specifications
Wafer size
mm
150 ~ 300
Maximum Temp Zone
°C
1200
Constant Temp Zone
mm
> 500
Temp Uniformity
°C
< ±0.5
Wafer Pitch
mm
6.35 [5.2~9]
Batch Size
#of wfs
50[max 75]
Throughput [4hr Process]
#of wfs/mo
9000
Temp Control
#of zones
4
Temp Control method
TC
Spike, Profile, Cascade
Water Loading System
Manual / Auto


Product Image

  • Mini Batch Vertical Furnace image

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