Full Batch Type Vertical Furnace
- Company Name:PST Co., Ltd.
- Membership:Free Member
- Member Since:2007. 10.31
- Country/Region:Korea
- City:Gyeonggi-do
- Contact:Dong-mi Kim
- Related Keywords:Full Batch, Vertical Furnace
PST Co., Ltd.
Contact us
PST Co., Ltd.
[Korea]
- Address
- #451-2 , Ipyeong-ri, Majang-myeon Icheon-si Gyeonggi-do
- Phone
- 82-31-6408831
- Contact name
- Dong-mi Kim
Quick Information
- Model Number : F30V
Description
Application
- Diffusion / Oxidation(Wet/Dry) / Annealing / Alloy / LPCVD
Features
- Full Batch 12" Vertical Furnace
- 16 FOUP stock
- Load Lock Function
- 2 FIMS (Improve Through-Put)
- Boat Rotation
- FAB Automation (OHT)
- Flexibility for S/W upgrade
Specification
Parameters |
Unit |
Specifications |
Wafer Size |
mm |
300 |
Temperature Range |
°C |
150 ~ 1200 |
Constant Temp Zone |
mm |
> 900 |
Temp Uniformity |
°C |
< ± 0.5 |
Wafer Pitch |
mm |
7.5 [5.5~9] |
Batch Size |
#of wfs |
100 |
Throughput [4hr Process] |
#of wfs/mo |
18,000 |
Temp Control |
#of zones |
4 ~ 5 |
Temp Control Mode |
T/C |
Spike, Profile, Cascade |
Product Image
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